[2026]
Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity
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2026.07.13 13:49
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저널명 : Microsystems & Nanoengineering, 12(1), 142
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- 관련링크 : http://10.1038/s41378-026-01265-60회 연결
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