[2026]
Selective laser-induced etching process-enabled double-cavity glass MEMS hydrogen sensor at room-temperature sensitivity
최고관리자
2026.07.13 13:49
2
0
:
저널명 : Microsystems & Nanoengineering, 12(1), 142
-
- 관련링크 : http://10.1038/s41378-026-01265-60회 연결
댓글목록 0